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Non-Contact Wafer Transfer
2014-07-21
Purpose:
To transfer wafers from standard 25-slot cassette to custom 13-slot cassette.
Capacity:
Transfer duration < 15s for single batch.
Wafer Size:
8"
Adventage:
1. Decrease loss from mis-operation.
2. Decrease particle comtamination.
3. HMI control, recipe settings, data logging...
3D Diagram:
Animation:
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